Publications

2 results for Pardeep Kumar

Multiple stages of regression to improve accuracy in calibrated lithography process models
- - Pardeep Kumar
  - Alan E. Rosenbluth
  - et al.
- 2018
- J. Micro/Nanolithogr. MEMS MOEMS
Lithography process model building using locally linear embedding
- - Pardeep Kumar
  - Alan E. Rosenbluth
  - et al.
- 2015
- SISPAD 2015