Lithography process model building using locally linear embedding
- Pardeep Kumar
- Alan E. Rosenbluth
- et al.
- 2015
- SISPAD 2015
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Multiple stages of regression to improve accuracy in calibrated lithography process models
- Pardeep Kumar
- Alan E. Rosenbluth
- et al.
- 2018
- J. Micro/Nanolithogr. MEMS MOEMS