Lithographic Image Simulation for the 21st Century with 19th-Century Tools
- Ronald L. Gordon
- Alan E. Rosenbluth
- 2003
- SPIE Optical Science and Technology 2003
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49 results for Alan E. Rosenbluth
Optimum mask and source patterns to print a given shape
- Alan E. Rosenbluth
- Rama N. Singh
- et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
Methodology for generating exposure tool specification for alternating phase shift mask application for 70 nm node
- Kafai Lai
- Gregg Gallatin
- et al.
- 2002
- SPIE Advanced Lithography 2002
Correction of contrast in projection systems by means of phase-controlled prism coatings and band-shifted twist compensators
- Alan E. Rosenbluth
- M. Lu
- et al.
- 2000
- IS&T/SPIE Electronic Imaging 2000
Projection optics for reflective light valves
- Alan E. Rosenbluth
- Rama N. Singh
- 1999
- Proceedings of SPIE - The International Society for Optical Engineering
Contrast losses in projection displays from depolarization by tilted beam splitter coatings
- Alan E. Rosenbluth
- D.B. Dove
- et al.
- 1997
- EURODISPLAY 1997
Measurement of the optical properties of high resolution TNLC light valves
- D.B. Dove
- Alan E. Rosenbluth
- 1997
- EURODISPLAY 1997
Vector diffraction analysis of phase-mask imaging in photoresist films
- Donis G. Flagello
- Alan E. Rosenbluth
- 1993
- Microlithography 1993
Scanning excimer ablation system
- Douglas S. Goodman
- Thomas Ainsworth
- et al.
- 1992
- LEOS 1992
Condenser aberrations in Köhler illumination
- Douglas S. Goodman
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989