Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas
- Aaron J. Windsor
- Jeremy C. Clark
- et al.
- 2025
- JVSTB
Publications
2 results for Judy J. Cha
Self-Healing of a Confined Phase Change Memory Device with a Metallic Surfactant Layer
- Y. Xie
- Wanki Kim
- et al.
- 2018
- Advanced Materials