Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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45 results for Anita Madan

Multitechnique metrology methods for evaluating pitch walking in 14 nm and beyond FinFETs
- - Robin Chao
  - Kriti K. Kohli
  - et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS
Observation of semiconductor device channel strain using in-line high resolution X-ray diffraction
- - Judson R. Holt
  - Anita Madan
  - et al.
- 2013
- Journal of Applied Physics
Effective Cu surface pre-treatment for high-reliable 22 nm-node Cu dual damascene interconnects with high plasma resistant ultra low-k dielectric (k = 2.2)
- - F. Ito
  - H. Shobha
  - et al.
- 2012
- Microelectronic Engineering
SIMS quantification of SiGe composition with low-energy ion beams
- - Zhengmao Zhu
  - Paul Ronsheim
  - et al.
- 2011
- Surface and Interface Analysis
Phase transitions in Ge-Sb phase change materials
- - Simone Raoux
  - Cyril Cabral
  - et al.
- 2009
- Journal of Applied Physics