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Emmanuel Delamarche- Jaiiick Stucki
- Martina Hitzbleck
- et al.
- 2012
- MicroTAS 2012
- Fabio Bianco
- Noemi Tonna
- et al.
- 2011
- MicroTAS 2011
- Martina Hitzbleck
- Luc Gervais
- et al.
- 2011
- MicroTAS 2011
- Linda K. Sundberg
- Greg M. Wallraff
- et al.
- 2010
- SPIE Photomask Technology + EUV Lithography 2010
- Luc Gervais
- Emmanuel Delamarche
- 2010
- MicroTAS 2010