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Ali Afzali- Jia Chen
- Christian Klinke
- et al.
- 2004
- DRC 2004
- J. Gelorme
- L.L. Kosbar
- et al.
- 2000
- Microlithography 2000
- 2000
- Microlithography 2000
- K. Pennington
- E. Simonyi
- et al.
- 1989
- SPIE OE/LASE 1989
- 2015
- Applied Physics Letters
- 2013
- Chemistry of Materials
- Joseph Abel
- Akitomo Matsubayashi
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
- Julie A. Bardecker
- Ali Afzali
- et al.
- 2012
- Chemistry of Materials
- Amal Kasry
- Ali A. Afzali
- et al.
- 2011
- Chemistry of Materials