Charge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Pressure and plasma effects on the properties of magnetron sputtered carbon films
- S.M. Rossnagel
- Michael A. Russak
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kink site saturation mechanism for whisker growth under sputtering conditions
- J.A. Van Vechten
- W. Solberg
- et al.
- 1987
- Journal of Crystal Growth
Property modification and synthesis by low energy particle bombardment concurrent with film growth
- J.J. Cuomo
- S.M. Rossnagel
- 1987
- Nuclear Inst. and Methods in Physics Research, B
Induced drift currents in circular planar magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Langmuir probe characterization of magnetron operation
- H.R. Kaufman
- S.M. Rossnagel
- 1986
- JVSTA
Hollow-cathode-enhanced magnetron sputtering
- J.J. Cuomo
- S.M. Rossnagel
- 1986
- JVSTA