Plasma induced gas heating in electron cyclotron resonance sources
- S.M. Rossnagel
- S.J. Whitehair
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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97 results for Stephen Rossnagel
Film modification by low energy ion bombardment during deposition
- S.M. Rossnagel
- J.J. Cuomo
- 1989
- Thin Solid Films
Magnetron plasma deposition processes
- Stephen M. Rossnagel
- 1989
- Thin Solid Films
Optical emission in magnetrons: Nonlinear aspects
- S.M. Rossnagel
- K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition and redeposition in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Magnetron plasma diagnostics and processing implications
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Current-voltage relations in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion beam bombardment effects during films deposition
- SM Rossnagel
- JJ Cuomo
- 1988
- Vacuum
Gas density reduction effects in magnetrons
- S.M. Rossnagel
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of the surface oxidation and magnetic properties of MnFe thin films
- S.L. Cohen
- Michael A. Russak
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films