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J.A. Oakley- Qianwen Chen
- Michael Belyansky
- et al.
- 2023
- ECTC 2023
- Mukta Farooq
- Arvind Kumar
- et al.
- 2022
- ECTC 2022
- C. Kothandaraman
- Sami Rosenblatt
- et al.
- 2016
- IEDM 2016
- Stefan Schoeche
- Daniel Schmidt
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
- Mukta Farooq
- Giuseppe La Rosa
- et al.
- 2015
- IRPS 2015