Publications

2 results for Itty Matthew

Design intent optimization at the beyond 7nm node: The intersection of DTCO and EUVL stochastic mitigation techniques
- - Michael Crouse
  - L. Liebmann
  - et al.
- 2017
- SPIE Advanced Lithography 2017
C-Quad polarized illumination for back end thin wire: Moving beyond annular illumination regime
- - Sohan Singh Mehta
  - Hyung-Rae Lee
  - et al.
- 2009
- SPIE Advanced Lithography 2009