Publications

2 results for Alok Ranjan

Guiding gate-etch process development using 3D surface reaction modeling for 7nm and beyond
- - Derren Dunn
  - John R. Sporre
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Plasma etch patterning of EUV lithography: Balancing roughness and selectivity trade off
- - Sebastian U. Engelmann
  - Qinghuang Lin
  - et al.
- 2016
- SPIE Advanced Lithography 2016