Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilane
- Mattias Vervaele
- Bert De Roo
- et al.
- 2017
- Advanced Engineering Materials
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A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films
- Mattias Vervaele
- Bert De Roo
- et al.
- 2017
- Advanced Engineering Materials