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31 results for
Michael Engel- 2018
- J. Micro/Nanolithogr. MEMS MOEMS
- Ashish Jagtiani
- Hiroyuki Miyazoe
- et al.
- 2016
- JVSTA
- Tony Low
- Michael Engel
- et al.
- 2014
- Physical Review B - CMMP
- R.S. Sundaram
- M. Engel
- et al.
- 2013
- Nano Letters
- 2012
- Applied Physics Letters