SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery
- John N. Myers
- Xiaoxian Zhang
- et al.
- 2017
- Applied Physics Letters
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6 results for Xiaoxian Zhang
SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH
- Xiaoxian Zhang
- John N. Myers
- et al.
- 2016
- Journal of Applied Physics
Nondestructive Characterization of Molecular Structures at Buried Copper/Epoxy Interfaces and Their Relationship to Locus of Failure Analysis
- John N. Myers
- Xiaoxian Zhang
- et al.
- 2015
- IEEE Transactions on CPMT
Probing the molecular structures of plasma-damaged and surface-repaired low-k dielectrics
- Xiaoxian Zhang
- John N. Myers
- et al.
- 2015
- Physical Chemistry Chemical Physics
Nondestructive in situ characterization of molecular structures at the surface and buried interface of silicon-supported low-k dielectric films
- John N. Myers
- Xiaoxian Zhang
- et al.
- 2015
- Journal of Physical Chemistry B
In situ observation of water behavior at the surface and buried interface of a low-K dielectric film
- Xiaoxian Zhang
- John N. Myers
- et al.
- 2014
- ACS AMI