Post Porosity Plasma Protection applied to a wide range of ultra low-k materials
- Theo Frot
- Willi Volksen
- et al.
- 2012
- IITC 2012
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94 results for Philip M. Rice
Large-scale (512kbit) integration of multilayer-ready access-devices based on Mixed-Ionic-Electronic-Conduction (MIEC) at 100% yield
- G.W. Burr
- K. Virwani
- et al.
- 2012
- VLSI Technology 2012
Endurance and scaling trends of novel access-devices for multi-layer crosspoint-memory based on mixed-ionic-electronic-conduction (MIEC) materials
- R.S. Shenoy
- K. Gopalakrishnan
- et al.
- 2011
- VLSI Technology 2011
Breakthrough reduction of low-k damage with cryoplasma ashing
- Francesca Iacopi
- Jai Hyuk Choi
- et al.
- 2010
- ADMETA 2010
Highly scalable novel access device based on Mixed Ionic Electronic Conduction (MIEC) materials for high density phase change memory (PCM) arrays
- K. Gopalakrishnan
- R.S. Shenoy
- et al.
- 2010
- VLSI Technology 2010
Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs
- Marinus Hopstaken
- Dirk Pfeiffer
- et al.
- 2010
- ECS Transactions
CMOS-integrated small-capacitance germanium waveguide photodetector for optical interconnects
- Solomon Assefa
- Fengnian Xia
- et al.
- 2009
- CLEO 2009
CMOS-integrated small-capacitance germanium waveguide photodetector for optical interconnects
- Solomon Assefa
- Fengnian Xia
- et al.
- 2009
- CLEO 2009
Integration of nanophotonic devices for on-chip optical interconnects
- Solomon Assefa
- Fengnian Xia
- et al.
- 2009
- OECC 2009
CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects
- Solomon Assefa
- Fengnian Xia
- et al.
- 2009
- OFC 2009