Publications

2 results for Mohamed Oulmane

Simulation of photoresist defect transfer through subsequent patterning processes
- - Dominik Metzler
  - Mohamed Oulmane
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Guiding gate-etch process development using 3D surface reaction modeling for 7nm and beyond
- - Derren Dunn
  - John R. Sporre
  - et al.
- 2017
- SPIE Advanced Lithography 2017