Imaging at high beam energies in the scanning electron microscope
- L. Gignac
- S.H. Boettcher
- et al.
- 2006
- M&M 2006
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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4 results for Steven Boettcher
Leveraging sub-E0 dose assessment methodology to improve EUV lithography cluster dose performance
- Chris Robinson
- Cody Murray
- et al.
- 2020
- SPIE Advanced Lithography 2020
Imaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope
- L. Gignac
- M. Kawasaki
- et al.
- 2005
- Journal of Applied Physics
Mechanisms for very long electromigration lifetime in dual-damascene Cu interconnections
- C.-K. Hu
- L. Gignac
- et al.
- 2001
- Applied Physics Letters