Methods for joint optimization of mask and design targets for improving lithographic process window
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
Publications
Date
Featured collections
Popular topics
31 results for Kanak Agarwal
Shape slack: A design-manufacturing co-optimization methodology using tolerance information
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
Design driven patterning optimizations for low K 1 lithography
- Kanak Agarwal
- Shayak Banerjee
- 2012
- ICICDT 2012
Accelerated statistical simulation via on-demand Hermite spline interpolations
- Rouwaida Kanj
- Tong Li
- et al.
- 2011
- ICCAD 2011
Electrically-driven retargeting for nanoscale layouts
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2011
- CICC 2011
Integrated model-based retargeting and optical proximity correction
- Kanak B. Agarwal
- Shayak Banerjee
- 2011
- SPIE Advanced Lithography 2011
Ground rule slack aware tolerance-driven optical proximity correction for local metal interconnects
- Shayak Banerjee
- Kanak Agarwal
- et al.
- 2010
- CICC 2010
A test structure for assessing individual contact resistance
- Frank Liu
- Kanak Agarwal
- 2009
- ICMTS 2009
The Impact of BEOL Lithography Effects on the SRAM Cell Performance and Yield
- Ying Zhou
- Rouwaida Kanj
- et al.
- 2009
- ISQED 2009
Compensating non-optical effects using electrically-driven optical proximity correction
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2009
- SPIE Advanced Lithography 2009