Tailored molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2015
- SPIE Advanced Lithography 2015
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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81 results for Urs Dürig
Molecular glass resists for scanning probe lithography
- Christian Neuber
- Andreas Ringk
- et al.
- 2014
- SPIE Advanced Lithography 2014
Thermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
Scanning probes entering data storage: From promise to reality
- H. Pozidis
- P. Bächtold
- et al.
- 2006
- INEC 2006
A highly parrallel probe-based storage system
- M. Despont
- T. Altebaeumer
- et al.
- 2004
- MNC 2004
Cantilevers with nano-heaters for thermomechanical storage application
- U. Drechsler
- N. Bürer
- et al.
- 2003
- Microelectronic Engineering
The millipede, a very dense, highly parallel scanning-probe data-storage system
- Giovanni Cherubini
- Th. Antonakopoulos
- et al.
- 2002
- ESSCIRC 2002
CMOS sensor array with cell-level analog-to-digital conversion for local probe date storage
- Teddy Loeliger
- Peter Bachtold
- et al.
- 2002
- ESSCIRC 2002
"Millipede": A MEMS-based scanning-probe data-storage system
- E. Eleftheriou
- Th. Antonakopoulos
- et al.
- 2002
- APMRC 2002
Thermomechanical formation and thermal sensing of nanometer-scale indentations in PMMA thin films for parallel and dense AFM data storage
- G. Cross
- M. Despont
- et al.
- 2000
- MRS Proceedings 2000