Amorphous carbon active contact layer for reliable nanoelectromechanical switches
- Daniel Grogg
- Christopher L. Ayala
- et al.
- 2014
- MEMS 2014
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Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts
- Christopher L. Ayala
- Daniel Grogg
- et al.
- 2015
- Solid-State Electronics