Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for David Conklin

High performance 14nm SOI FinFET CMOS technology with 0.0174μm² embedded DRAM and 15 levels of Cu metallization
- - C.-H.C-H. Lin
  - Brian Greene
  - et al.
- 2014
- IEDM 2014
Novel in-line metrology methods for Fin pitch walking monitoring in 14nm node and beyond
- - Robin Chao
  - Kriti Kohli
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Application of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology
- - Deborah A. Ryan
  - Oliver D. Patterson
  - et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS
Multitechnique metrology methods for evaluating pitch walking in 14 nm and beyond FinFETs
- - Robin Chao
  - Kriti K. Kohli
  - et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS