Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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7 results for M. Darnon

Trigate 6T SRAM scaling to 0.06 μm²
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- IEDM 2009
The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials
- - Krystelle Lionti
  - M. Darnon
  - et al.
- 2015
- Journal of Applied Physics
Toward successful integration of porous low-k materials: Strategies addressing plasma damage
- - Krystelle Lionti
  - Willi Volksen
  - et al.
- 2014
- ECS J. Solid State Sci. Technol.
Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
- - Robert Bruce
  - Sebastian Engelmann
  - et al.
- 2013
- Journal of Physics D: Applied Physics
Impact of low-k structure and porosity on etch processes
- - Maxime Darnon
  - Nicolas Casiez
  - et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- - Willi Volksen
  - Sampath Purushothaman
  - et al.
- 2012
- ECS J. Solid State Sci. Technol.
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures