Extendibility of Cu damascene to 0.1 μm wide interconnections
- C.-K. Hu
- K.Y. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Publications
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140 results for Lynne Gignac
Mechanisms for microstructure evolution in electroplated copper thin films
- J.M.E. Harper
- C. Cabral Jr.
- et al.
- 1999
- MRS Spring Meeting 1999
Characterization of plated Cu thin film microstructures
- L. Gignac
- K.P. Rodbell
- et al.
- 1999
- MRS Spring Meeting 1999
In situ TEM analysis of TiSi2 C49-C54 transformations during annealing
- L. Gignac
- V. Svilan
- et al.
- 1996
- MRS Fall Meeting 1996
Film crystallographic texture and substrate surface roughness in layered aluminum metallization
- K.P. Rodbell
- V. Svilan
- et al.
- 1996
- MRS Spring Meeting 1996
Directed self-assembly of ge quantum dots using focused Si2+ ion beam patterning
- See Wee Chee
- Martin Kammler
- et al.
- 2018
- Scientific Reports
Wafer-scale integration of sacrificial nanofluidic chips for detecting and manipulating single DNA molecules
- Chao Wang
- Sung Wook Nam
- et al.
- 2017
- Nature Communications
Intrinsically ultrastrong plasmon–exciton interactions in crystallized films of carbon nanotubes
- Po Hsun Ho
- Damon B. Farmer
- et al.
- 2018
- PNAS
Stacking graphene channels in parallel for enhanced performance with the same footprint
- Aaron D. Franklin
- Satoshi Oida
- et al.
- 2013
- IEEE Electron Device Letters
Stable ultrahigh-density magneto-optical recordings using introduced linear defects
- L. Krusin-Elbaum
- T. Shibauchi
- et al.
- 2001
- Nature