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L. Grenouillet- K. Cheng
- A. Khakifirooz
- et al.
- 2012
- IEDM 2012
- E. Augendre
- S. Maitrejean
- et al.
- 2015
- S3S 2015
- Sen Liu
- Steven Holmes
- et al.
- 2013
- SPIE Advanced Lithography 2013
- Q. Liu
- Frederic Monsieur
- et al.
- 2011
- VLSI Technology 2011
- José P. B. Silva
- Ruben Alcala
- et al.
- 2023
- APL Materials