0.026μm2 high performance Embedded DRAM in 22nm technology for server and SOC applicationsC. PeiG. Wanget al.2014IEDM 2014
22nm technology yield optimization using multivariate 3D virtual fabricationB. CiprianyB. Jagannathanet al.2013SISPAD 2013
22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOLS. NarasimhaP. Changet al.2012IEDM 2012
High performance 45-nm SOI technology with enhanced strain, porous low-k BEOL, and immersion lithographyS. NarasimhaK. Onishiet al.2006IEDM 2006