Publications

2 results for Nihar Mohanty

Fin formation using graphoepitaxy DSA for FinFET device fabrication
- - Chi Chun Liu
  - Fee Li Lie
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Towards electrical testable soi devices using directed self-assembly for fin formation
- - Chi Chun Liu
  - Cristina Estrada-Raygoza
  - et al.
- 2014
- SPIE Advanced Lithography 2014