Publications

2 results for Tsung-Sheng Kang

Monolithic Stacked FET with Stepped Channels for Future Logic Technologies
- - Chen Zhang
  - Seungmin Song
  - et al.
- 2024
- IEDM 2024
Etch and Patterning Development for 2nm Node Nanosheet Devices
- - Eric Miller
  - Indira Seshadri
  - et al.
- 2022
- SPIE Advanced Lithography 2022