From Lab to Fab - In-line SIMS for Process Control in Nanosheet Gate-All-Around Device Manufacturing
- Stefan Schoeche
- Katherine Sieg
- et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024
Publications
4 results for Marinus Hopstaken
Silicon Device-Based Sensing for Sustainability
- Sufi Zafar
- Thomas Picunko
- et al.
- 2023
- IEDM 2023
Opportunities of topological semimetals as novel material for computing. Experimental transport studies and devices
- Heinz Schmid
- Alan Molinari
- et al.
- 2023
- MRS Spring Meeting 2023
New Phase-Change Materials by Atomic-Level Engineering the Dopants for Extremely Low Vth Drift at 85oC and High Endurance 3D Crosspoint Memory
- Michelle Cheng
- Alexander Grun
- et al.
- 2022
- IEDM 2022