Fully Automated Thermal Scanning Probe Lithography for FET Batch Fabrication
- Armin Knoll
- Jana Chaaban
- et al.
- 2022
- e-MRS Spring Meeting 2022
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.