Photoconductive Switching of a High-Voltage Actuator Array
- Vesna Bacheva
- Edouard Leroy
- et al.
- 2022
- MEMS 2022
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Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches
- Vesna Bacheva
- Amir Firouzeh
- et al.
- 2023
- Microsystems & Nanoengineering