Plasma Activated Low-temperature Die-level Direct Bonding with Advanced Wafer Dicing Technologies for 3D Heterogeneous Integration
- Katsuyuki Sakuma
- Dishit Parekh
- et al.
- 2021
- ECTC 2021
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Direct Bonded Heterogeneous Integration (DBHi) Si Bridge
- Kamal Sikka
- Ravi Bonam
- et al.
- 2021
- ECTC 2021
Laser vs. Blade Dicing for Direct Bonded Heterogeneous Integration (DBHi) Si Bridge
- Aakrati Jain
- Kamal Sikka
- et al.
- 2021
- ECTC 2021