Non-intrusive mapping of subsurface defects in semiconductors
- D. Guidotti
- M.A. Taubenblatt
- et al.
- 1992
- Applied Physics A Solids and Surfaces
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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38 results for Marc A. Taubenblatt
Patterned wafer inspection using spatial filtering for the cluster environment
- M.A. Taubenblatt
- J.S. Batchelder
- 1992
- Applied Optics
Measurement of the size and refractive index of a small particle using the complex forward-scattered electromagnetic field
- M.A. Taubenblatt
- J.S. Batchelder
- 1991
- Applied Optics
Investigation of particle pairing in liquids
- Douglas W Cooper
- J.Samuel Batchelder
- et al.
- 1991
- Journal of Colloid And Interface Science
Light scattering from cylindrical structures on surfaces
- M.A. Taubenblatt
- 1990
- Optics Letters
Lateral forces and topography using scanning tunneling microscopy with optical sensing of the tip position
- Marc A. Taubenblatt
- 1989
- Applied Physics Letters
Interferometric detection of forward scattered light from small particles
- J.S. Batchelder
- M.A. Taubenblatt
- 1989
- Applied Physics Letters
Photothermal absorption microprobe: Infrared spectroscopy of a single 1 μm organic particle
- Marc A. Taubenblatt
- 1988
- Applied Physics Letters