Publications

8 results for Manasa Medikonda

Spectral interferometry for fully integrated device metrology
- - Daniel Schmidt
  - Manasa Medikonda
  - et al.
- 2023
- JM3
Vertical Travelling Scatterometry for Metrology on Fully Integrated Devices
- - D. Schmidt
  - Manasa Medikonda
  - et al.
- 2022
- SPIE Advanced Lithography 2022
OCD enhanced: Implementation and validation of spectral interferometry for nanosheet inner spacer indentation
- - Daniel Schmidt
  - C. Durfee
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Optical properties of pseudomorphic Ge_1-xSn_x (x = 0 to 0.11) alloys on Ge(001)
- - Manasa Medikonda
  - Gangadhara R. Muthinti
  - et al.
- 2014
- JVSTB
Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO₂and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes
- - Steven Consiglio
  - Kandabara Tapily
  - et al.
- 2014
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf _1-xZr_xO₂ gate dielectrics deposited by a cyclical deposition and annealing scheme
- - Relja Vasić
  - Steven Consiglio
  - et al.
- 2013
- Journal of Applied Physics
Effects of stress on the dielectric function of strained pseudomorphic Si _1-xGe _x alloys from 0 to 75 Ge grown on Si (001)
- - Gangadhara Raja Muthinti
  - Manasa Medikonda
  - et al.
- 2012
- Journal of Applied Physics
Effect of germanium concentration on the dielectric function of strained Si _1-xGe _x films
- - Manasa Medikonda
  - Gangadhara R. Muthinti
  - et al.
- 2012
- ISTDM 2012