NanoStack Transistor Architecture for CMOS 7A Node and Beyond
- Shay Reboh
- Chen Zhang
- et al.
- 2025
- VLSI Technology and Circuits 2025
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3 results for Wei-Tsu Tseng
Fully subtractive Ru Topvia interconnects with minimum 9 nm-space airgap for RC performance and reliability enhancement as post-Cu interconnects
- Koichi Motoyama
- Jaemyung Choi
- et al.
- 2024
- IEDM 2024
Metal Corrosion Mitigation in Fine Geometries during Chemical Mechanical Planarization
- Wei-Tsu Tseng
- Emiko Motoyama
- et al.
- 2024
- ECS Spring Meeting 2024