Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for K. Tanwar

Electromigration extendibility of Cu(Mn) alloy-seed interconnects, and understanding the fundamentals
- - Takeshi Nogami
  - C. Penny
  - et al.
- 2012
- IEDM 2012
Performance of ultrathin alternative diffusion barrier metals for next - Generation BEOL technologies, and their effects on reliability
- - Takeshi Nogami
  - M. Chae
  - et al.
- 2014
- IITC/AMC 2014
CVD-Co/Cu(Mn) integration and reliability for 10 nm node
- - Takeshi Nogami
  - M. He
  - et al.
- 2013
- IITC 2013
BEOL Cu CMP process evaluation for advanced technology nodes
- - Kunaljeet Tanwar
  - Donald Canaperi
  - et al.
- 2013
- JES