Improved performance of large stroke comb-drive actuators by using a stepped finger shape
- J.B.C. Engelen
- M.A. Lantz
- et al.
- 2009
- TRANSDUCERS 2009
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5 results for L. Abelmann
Ultra-flat bismuth films for diamagnetic levitation by template-stripping
- J. Kokorian
- Johan B. C. Engelen
- et al.
- 2014
- Thin Solid Films
Nanopositioner actuator energy cost and performance
- Johan B. C. Engelen
- Mohammed G. Khatib
- et al.
- 2013
- Sensors and Actuators, A: Physical
Force modulation for enhanced nanoscale electrical sensing
- W.W. Koelmans
- Abu Sebastian
- et al.
- 2011
- Nanotechnology
A mass-balanced through-wafer electrostatic x/y-scanner for probe data storage
- J.B.C. Engelen
- H. Rothuizen
- et al.
- 2009
- Microelectronic Engineering