A cantilever array-based artificial nose
- M.K. Baller
- H.P. Lang
- et al.
- 2000
- Ultramicroscopy
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113 results for Michel Despont
"Millipede" - An AFM data storage system at the frontier of nanotribology
- U. Dürig
- G. Cross
- et al.
- 2000
- Tribology Letters
Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Despont
- et al.
- 1999
- Sensors and Actuators, A: Physical
Ultrahigh-density atomic force microscopy data storage with erase capability
- G. Binnig
- M. Despont
- et al.
- 1999
- Applied Physics Letters
Ultrahigh density, high-data-rate NEMS-based AFM data storage system
- P. Vettiger
- J. Brugger
- et al.
- 1999
- Microelectronic Engineering
Soft, entirely photoplastic probes for scanning force microscopy
- G. Genolet
- J. Brugger
- et al.
- 1999
- Review of Scientific Instruments
SU-8: A low-cost negative resist for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1999
- JMM
Sequential position readout from arrays of micromechanical cantilever sensors
- H.P. Lang
- R. Berger
- et al.
- 1998
- Applied Physics Letters
Low-cost PDMS seal ring for single-side wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1998
- Sensors and Actuators, A: Physical