Ultrahigh density, high-data-rate NEMS-based AFM data storage system
- P. Vettiger
- J. Brugger
- et al.
- 1999
- Microelectronic Engineering
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113 results for Michel Despont
Soft, entirely photoplastic probes for scanning force microscopy
- G. Genolet
- J. Brugger
- et al.
- 1999
- Review of Scientific Instruments
SU-8: A low-cost negative resist for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1999
- JMM
A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors
- H.P. Lang
- R. Berger
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
Sequential position readout from arrays of micromechanical cantilever sensors
- H.P. Lang
- R. Berger
- et al.
- 1998
- Applied Physics Letters
Low-cost PDMS seal ring for single-side wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1998
- Sensors and Actuators, A: Physical
Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- Laurent Dellmann
- Sylvian Roth
- et al.
- 1998
- Sensors and Actuators, A: Physical
Piezoresistive cantilever designed for torque magnetometry
- M. Willemin
- C. Rossel
- et al.
- 1998
- Journal of Applied Physics
Fabrication of photoplastic high-aspect ratio microparts and micromolds usina SU-8 UV resist
- H. Lorenz
- M. Despont
- et al.
- 1998
- Microsystem Technologies
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1998
- Sensors and Actuators, A: Physical