Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- Michel Despont
- Gilles Beljakovic
- et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
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113 results for Michel Despont
Local electrochemical oxidation/reduction: First step towards a new lithography?
- Jean-Pierre Locquet
- Frédéric Arrouy
- et al.
- 1995
- Applied Physics Letters
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering