A mass-balanced through-wafer electrostatic x/y-scanner for probe data storage
- J.B.C. Engelen
- H. Rothuizen
- et al.
- 2009
- Microelectronic Engineering
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.