Publications

3 results for David Demaris

Fast detection of novel problematic patterns based on dictionary learning and prediction of their lithographic difficulty
- - F. De Morsier
  - David Demaris
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Automated sample plan selection for OPC modeling
- - Nathalie Casati
  - Maria Gabrani
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Fast source independent estimation of lithographic difficulty supporting large scale source optimization
- - David Demaris
  - Maria Gabrani
  - et al.
- 2012
- SPIE Advanced Lithography 2012