Phase formation and stability of Ni silicide contacts - Scaling to ultra-thin films
- C. Detavernier
- K. De Keyser
- et al.
- 2010
- ICSICT 2010
Publications
Date
Featured collections
Popular topics
152 results for Jean L. Jordan-Sweet
Amorphization of crystalline phase change material by ion implantation
- Simone Raoux
- Guy M. Cohen
- et al.
- 2010
- MRS Online Proceedings Library
Scaling properties of phase change materials
- Simone Raoux
- Charles T. Rettner
- et al.
- 2007
- NVMTS 2007
Influence of alloying elements on the formation and stability of NiSi
- C. Detavernier
- D. Deduytsche
- et al.
- 2006
- ECS Meeting 2006
Applications of synchrotron X-rays in microelectronics industry research
- Jean L. Jordan-Sweet
- Christophe Detavernier
- et al.
- 2005
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Kinetics of agglomeration of NiSi and NiSi2 phase formation
- C. Detavernier
- A.S. Özcan
- et al.
- 2002
- MRS Proceedings 2002
Thermal stability of strained Si on relaxed Si1-xGex buffer layers
- P.M. Mooney
- S.J. Koester
- et al.
- 2001
- MRS Proceedings 2001
Crystallization of hafnium-oxide-based ferroelectrics for BEOL integration
- Martin M. Frank
- Eduard A. Cartier
- et al.
- 2022
- EDTM 2022
The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture
- F.A. Geenen
- E. Solano
- et al.
- 2018
- Journal of Applied Physics
Controlling the formation and stability of ultra-thin nickel silicides - An alloying strategy for preventing agglomeration
- F.A. Geenen
- K. Van Stiphout
- et al.
- 2018
- Journal of Applied Physics