Publications

2 results for Changan Wang

Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk
- - David Fryer
  - Michael Lam
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Benchmarking study of 3D mask modeling for 2 and 1x nodes
- - Chang An Wang
  - Chao-Chun Liang
  - et al.
- 2013
- SPIE Advanced Lithography 2013