Fabrication, Characterization, and modeling of fully-Batch-Fabricated piston-Type electrodynamic microactuators
- Shashank G. Sawant
- Naigang Wang
- et al.
- 2014
- JMEMS
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Tip-based nanomanufacturing by electrical, chemical, mechanical and thermal processes
- A.P. Malshe
- K.P. Rajurkar
- et al.
- 2010
- CIRP Annals - Manufacturing Technology