Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair
- Richard Haight
- Alfred Wagner
- et al.
- 2005
- Lasers and Applications in Science and Engineering 2005
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29 results for Alfred Wagner
High resolution material ablation and deposition with femtosecond lasers and applications to photomask repair
- Richard Haight
- Alfred Wagner
- et al.
- 2004
- Journal of Modern Optics
High Resolution Material Processing with Femtosecond Lasers: Mask Repair and Beyond
- Richard Haight
- Alfred Wagner
- et al.
- 2003
- FiO 2003
Metal deposition with femtosecond light pulses at atmospheric pressure
- R. Haight
- P. Longo
- et al.
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
MARS2: An advanced femtosecond laser mask repair tool
- Alfred Wagner
- Richard Haight
- et al.
- 2002
- SPIE Photomask Technology 2002
MARS: Femtosecond laser mask advanced repair system in manufacturing
- Richard Haight
- Dennis Hayden
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Implementation and performance of a femtosecond laser mask repair system in manufacturing
- R. Haight
- Dennis Hayden
- et al.
- 1998
- BACUS Symposium on Photomask Technology and Management 1998
Minimum emission current of liquid metal ion sources
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Energy spread in liquid metal ion sources at low currents
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
High conductivity FIB deposited metal
- P.G. Blauner
- A. Wagner
- 1995
- MRS Fall Meeting 1995