Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for Steven Nash

Learning from native defects on EUV mask blanks
- - Emily Gallagher
  - Alfred Wagner
  - et al.
- 2014
- SPIE Optics + Photonics 2014
Two-dimensional mask effects at the 14 nm logic node
- - A.E. Zweber
  - A.E. McGuire
  - et al.
- 2013
- SPIE Photomask Technology 2013
Using pattern shift to avoid blank defects during EUVL mask fabrication
- - Yoshiyuki Negishi
  - Yuki Fujita
  - et al.
- 2013
- Photomask and Next-Generation Lithography Mask Technology 2013
High-accuracy defect-free X-Ray mask technology
- - Steven C. Nash
  - Thomas B. Faure
  - et al.
- 1994
- Japanese Journal of Applied Physics