Precision positioning for thermal scanning probe lithography
- Philip Paul
- Simon Züst
- et al.
- 2015
- EUSPEN 2015
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22 results for Colin D. Rawlings
Tailored molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2015
- SPIE Advanced Lithography 2015
Nanometer control of the markerless overlay process using thermal scanning probe lithography
- Colin Rawlings
- Urs Duerig
- et al.
- 2014
- AIM 2014
Closed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Molecular glass resists for scanning probe lithography
- Christian Neuber
- Andreas Ringk
- et al.
- 2014
- SPIE Advanced Lithography 2014
Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution
- Stefan Fringes
- Christian Schwemmer
- et al.
- 2019
- Nano Letters
Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing
- Colin D. Rawlings
- Yu Kyoung Ryu
- et al.
- 2018
- Nanotechnology
Comprehensive modeling of Joule heated cantilever probes
- Martin Spieser
- Colin D. Rawlings
- et al.
- 2017
- Journal of Applied Physics
Thermal scanning probe lithography for the directed self-assembly of block copolymers
- Steven Gottlieb
- Matteo Lorenzoni
- et al.
- 2017
- Nanotechnology
Sub-20 nm silicon patterning and metal lift-off using thermal scanning probe lithography
- Heiko Wolf
- Colin D. Rawlings
- et al.
- 2015
- JVSTB