Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

1 result for Andrei Fustochenko

Trilayer process for T -gate and Γ-gate lithography using ternary developer and proximity effect correction superposition
- - Leonidas E. Ocola
  - James Bucchignano
  - et al.
- 2022
- Journal of Vacuum Science and Technology B