Stochastic simulations of temperature programmed desorption kinetics
- F.A. Houle
- W.D. Hinsberg
- 1995
- Surface Science
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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120 results for William D. Hinsberg
Simulations of thermal decomposition and film growth from the group VI metal hexacarbonyls
- F.A. Houle
- W.D. Hinsberg
- 1995
- Journal of Physical Chemistry
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- G.M. Wallraff
- John M. Hutchinson
- et al.
- 1995
- Microelectronic Engineering
Airborne Contamination of a Chemically Amplified Resist. 2. Effect of Polymer Film Properties on Contamination Rate
- William D. Hinsberg
- Scott A. MacDonald
- et al.
- 1994
- Chemistry of Materials
193 nm resists and lithography
- Roderick R. Kunz
- Robert D. Allen
- et al.
- 1994
- Polymers for Advanced Technologies
Airborne Contamination of a Chemically Amplified Resist. 1. Identification of Problem
- Scott A. MacDonald
- William D. Hinsberg
- et al.
- 1993
- Chemistry of Materials
Synthesis ano ferroelectric properties of liquid crystals derived from 4-mercaptobenzoic acid
- R.J. Twieg
- K. Betterton
- et al.
- 1991
- Ferroelectrics
Characterization of a Photoresist with Wavelength Selected Tone
- Lester A. Pederson
- Andrew R. Neureuther
- et al.
- 1990
- IEEE T-ED
Ferroelectric α-Chloroester Thiobenzoate Liquid Crystals
- R.J. Twieg
- K. Betterton
- et al.
- 1989
- Ferroelectrics
Quartz crystal microbalance thin-film dissolution rate monitor
- William D. Hinsberg
- Kay K. Kanazawa
- 1989
- Review of Scientific Instruments