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110 results for
Hugo Rothuizen- M. Despont
- J. Brugger
- et al.
- 1999
- MEMS 1999
- 1999
- Semiconductor Science and Technology
- P. Vettiger
- J. Brugger
- et al.
- 1999
- Microelectronic Engineering
- Christophe Fumeaux
- Glenn D. Boreman
- et al.
- 1999
- Applied Optics
- G.D. Boreman
- C. Fumeaux
- et al.
- 1998
- Optics Letters
- C. Fumeaux
- Fritz K. Kneubühl
- et al.
- 1998
- Proceedings of SPIE - The International Society for Optical Engineering
- C. Fumeaux
- W. Herrmann
- et al.
- 1998
- MSMW 1998
- E. Delamarche
- H. Schmid
- et al.
- 1998
- Journal of Physical Chemistry B
- M. Willemin
- C. Rossel
- et al.
- 1998
- Journal of Applied Physics
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1998
- MEMS 1998