Ionized physical vapor deposition of Cu for high aspect ratio damascene trench fill applications
- C. Nichols
- S.M. Rossnagel
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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34 results for Satoshi Hamaguchi
Simulations of trench-filling profiles under ionized magnetron sputter metal deposition
- S. Hamaguchi
- S.M. Rossnagel
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Spline Approximation of "Effective" Potentials under Periodic Boundary Conditions
- R.T. Farouki
- S. Hamaguchi
- 1994
- Journal of Computational Physics
Polarization force on a charged particulate in a nonuniform plasma
- S. Hamaguchi
- R.T. Farouki
- 1994
- Physical Review E
Thermodynamics of strongly-coupled Yukawa systems near the one-component-plasma limit. I. Derivation of the excess energy
- S. Hamaguchi
- R.T. Farouki
- 1994
- The Journal of Chemical Physics
Thermodynamics of strongly-coupled Yukawa systems near the one-component-plasma limit. II. Molecular dynamics simulations
- R.T. Farouki
- S. Hamaguchi
- 1994
- The Journal of Chemical Physics
Plasma-particulate interactions in nonuniform plasmas with finite flows
- S. Hamaguchi
- R.T. Farouki
- 1994
- Physics of Plasmas
Intrinsic and Passivation-Induced Trench Tapering during Plasma Etching
- S. Hamaguchi
- M. Dalvie
- 1994
- JES
A shock-tracking algorithm for surface evolution under reactive-ion etching
- S. Hamaguchi
- M. Dalvie
- et al.
- 1993
- Journal of Applied Physics
Thermal energy of the crystalline one-component plasma from dynamical simulations
- R.T. Farouki
- S. Hamaguchi
- 1993
- Physical Review E